Gregory L. Snider Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gregory L. Snider returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition
2Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier
3Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions
4Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition