Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier
Type:
Journal
Info:
Journal of Vacuum Science & Technology B 33, 06FG02 (2015)
Date:
2015-09-21
Author Information
Name | Institution |
---|---|
Golnaz Karbasian | University of Notre Dame |
Alexei O. Orlov | University of Notre Dame |
Gregory L. Snider | University of Notre Dame |
Films
Film/Plasma Properties
Substrates
SiO2 |
Ni |
Keywords
Notes
397 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |