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  • Plasma-Enhanced Atomic Layer Deposition
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Alexei P. Orlov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexei P. Orlov returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier
2Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure
3Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions
4Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition
5Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition