Alexei O. Orlov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexei O. Orlov returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Experimental demonstration of single electron transistors featuring SiO2 plasma-enhanced atomic layer deposition in Ni-SiO2-Ni tunnel junctions
2Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier
3Metal-Insulator-Metal Single Electron Transistors with Tunnel Barriers Prepared by Atomic Layer Deposition
4Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition