Fabrication of nanoporous membranes for tuning microbial interactions and biochemical reactions

Type:
Journal
Info:
J. Vac. Sci. Technol. B 33(6), Nov/Dec 2015
Date:
2015-09-28

Author Information

Name Institution
Peter G. ShanklesOak Ridge National Laboratory
Andrea C. TimmOak Ridge National Laboratory
Mitchel J. DoktyczOak Ridge National Laboratory
Scott T. RettererOak Ridge National Laboratory

Films

Plasma SiO2


Film/Plasma Properties

Substrates

Silicon

Notes

1389