Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications

Type:
Journal
Info:
Applied Optics, Vol. 56, No. 4, 2017
Date:
2016-10-12

Author Information

Name Institution
Svetlana ShestaevaFraunhofer Institute for Applied Optics and Precision Engineering
Astrid BingelFraunhofer Institute for Applied Optics and Precision Engineering
Peter MunzertFraunhofer Institute for Applied Optics and Precision Engineering
Lilit GhazaryanFriedrich-Schiller-Universität Jena
Christian PatzigFraunhofer Institute for Microstructure of Materials and Systems IMWS
Andreas T√ľnnermannFraunhofer Institute for Applied Optics and Precision Engineering
Adriana SzeghalmiFraunhofer Institute for Applied Optics and Precision Engineering

Films

Thermal Al2O3


Plasma Al2O3


Plasma SiO2


Plasma SiO2


Thermal SiO2


CAS#: 0-0-0

CAS#: 10028-15-6


Film/Plasma Properties

Characteristic: Stress
Analysis: Stress Measurement

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Substrates

Si(100)
SiO2
Lithosil Q1
Glass
Glass, BK7

Keywords

Optical

Notes

878