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Publication Information

Title: Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications

Type: Journal

Info: Applied Optics, Vol. 56, No. 4, 2017

Date: 2016-10-12

DOI: http://dx.doi.org/10.1364/AO.56.000C47

Author Information

Name

Institution

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Friedrich-Schiller-Universität Jena

Fraunhofer Institute for Microstructure of Materials and Systems IMWS

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Films

Deposition Temperature = 120C

75-24-1

7732-18-5

Deposition Temperature Range = 25-300C

75-24-1

7782-44-7

Deposition Temperature Range = 100-300C

15112-89-7

7782-44-7

Deposition Temperature = 200C

27804-64-4

7782-44-7

Deposition Temperature = 200C

0-0-0

10028-15-6

Deposition Temperature Range = 100-300C

19962-11-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Stress

Stress Measurement

Flexus 2320 Thin Film Stress Measurement System

Chemical Composition, Impurities

FTIR, Fourier Transform InfraRed spectroscopy

Varian 3100 FTIR

Images

SEM, Scanning Electron Microscopy

Hitachi S-4800 Field Emission Scanning Electron Microscope

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Veeco AFM

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Bruker D8 Advance

Microstructure

TEM, Transmission Electron Microscope

FEI Tecnai G2 F20 S-Twin

Microstructure

TEM, Transmission Electron Microscope

FEI Titan 3

Substrates

Si(100)

SiO2

Lithosil Q1

Glass

Glass, BK7

Keywords

Optical

Notes

878


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