Peter Munzert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Munzert returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of ALD SiO2 thin films for optical applications
2High-Reflective Coatings For Ground and Space Based Applications
3Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
4Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material