Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Peter Munzert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Munzert returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of ALD SiO2 thin films for optical applications
2Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
3High-Reflective Coatings For Ground and Space Based Applications
4Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications