Peter Munzert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Munzert returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
2Comparative study of ALD SiO2 thin films for optical applications
3Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
4High-Reflective Coatings For Ground and Space Based Applications