Publication Information

Title:
High-Reflective Coatings For Ground and Space Based Applications
Type:
Journal
Info:
ICSO 2014
Date:
2014-10-07

Author Information

Name Institution
M. SchürmannFraunhofer Institute for Applied Optics and Precision Engineering
S. SchwindeFraunhofer Institute for Applied Optics and Precision Engineering
P. J. JobstFraunhofer Institute for Applied Optics and Precision Engineering
O. StenzelFraunhofer Institute for Applied Optics and Precision Engineering
S. WilbrandtFraunhofer Institute for Applied Optics and Precision Engineering
Adriana SzeghalmiFriedrich-Schiller-Universität Jena
Astrid BingelFraunhofer Institute for Applied Optics and Precision Engineering
Peter MunzertFraunhofer Institute for Applied Optics and Precision Engineering
Norbert KaiserFraunhofer Institute for Applied Optics and Precision Engineering

Films

Plasma Al2O3


Plasma SiO2


Film/Plasma Properties

Characteristic: Reflectance Spectra
Analysis: Optical Reflectivity

Characteristic: Transmittance
Analysis: Optical Transmission

Characteristic: Damage, Defects
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Damage, Defects
Analysis: Optical Microscopy

Characteristic: Refractive Index
Analysis: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Film Stress
Analysis: Wafer Curvature

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy

Substrates

Ag

Keywords

Optical

Notes

456