Astrid Bingel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Astrid Bingel returned 4 record(s).

Number	Title
1	Comparative study of ALD SiO2 thin films for optical applications
2	Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
3	High-Reflective Coatings For Ground and Space Based Applications
4	Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material