Peter Munzert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Munzert returned 4 record(s).

Number	Title
1	High-Reflective Coatings For Ground and Space Based Applications
2	Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
3	Comparative study of ALD SiO₂ thin films for optical applications
4	Plasma-enhanced atomic layer deposition for antireflection coatings using SiO₂ as low-refractive index material