Lilit Ghazaryan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lilit Ghazaryan returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of ALD SiO2 thin films for optical applications
2Composite materials and nanoporous thin layers made by atomic layer deposition
3Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
4Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching