Svetlana Shestaeva Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Svetlana Shestaeva returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
2Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
3Comparative study of ALD SiO2 thin films for optical applications