Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparative study of ALD SiO2 thin films for optical applications|
|2||Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications|
|3||Modal properties of a strip-loaded horizontal slot waveguide|
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