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AP-LTO 330, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of ALD SiO2 thin films for optical applications
2Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
3Modal properties of a strip-loaded horizontal slot waveguide


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