AP-LTO 330, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

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1Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
2Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
3Modal properties of a strip-loaded horizontal slot waveguide
4Comparative study of ALD SiO2 thin films for optical applications