AP-LTO 330, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of ALD SiO2 thin films for optical applications
2Modal properties of a strip-loaded horizontal slot waveguide
3Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
4Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors