Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Oxford Instruments OpAL Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using Oxford Instruments OpAL hardware returned 62 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |