Oxford Instruments OpAL Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications using Oxford Instruments OpAL hardware returned 70 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|
| 1 | Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition |
| 2 | Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3 |
| 3 | Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide |
| 4 | Hafnia and alumina on sulphur passivated germanium |
| 5 | Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition |
| 6 | Gadolinium nitride films deposited using a PEALD based process |
| 7 | High-efficiency embedded transmission grating |
| 8 | Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition |
| 9 | Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer, CVD-grown graphene |
| 10 | Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD |
| 11 | Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma |
| 12 | Trapped charge densities in Al2O3-based silicon surface passivation layers |
| 13 | Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition |
| 14 | On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes |
| 15 | Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS2 MOSFET with an AlN Interfacial Layer |
| 16 | Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications |
| 17 | Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3 |
| 18 | Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition |
| 19 | Fabrication and deformation of three-dimensional hollow ceramic nanostructures |
| 20 | Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition |
| 21 | Nanowire single-photon detectors made of atomic layer-deposited niobium nitride |
| 22 | Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon |
| 23 | High-Reflective Coatings For Ground and Space Based Applications |
| 24 | Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3 |
| 25 | Firing Stable Al2O3/SiNx Layer Stack Passivation for the Front Side Boron Emitter of n-type Silicon Solar Cells |
| 26 | Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film |
| 27 | Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings |
| 28 | Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films |
| 29 | Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering |
| 30 | Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation |
| 31 | Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS |
| 32 | Mechanical characterization of hollow ceramic nanolattices |
| 33 | Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes |
| 34 | Atomic Layer Deposition of Niobium Nitride from Different Precursors |
| 35 | Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells |
| 36 | Breakdown and Protection of ALD Moisture Barrier Thin Films |
| 37 | Electrically Excited Plasmonic Nanoruler for Biomolecule Detection |
| 38 | Atomic layer deposition of high-mobility hydrogen-doped zinc oxide |
| 39 | Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection |
| 40 | Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range |
| 41 | Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides |
| 42 | Encapsulation method for atom probe tomography analysis of nanoparticles |
| 43 | Electron-selective contacts via ultra-thin organic interface dipoles for silicon organic heterojunction solar cells |
| 44 | α-Ga2O3 grown by low temperature atomic layer deposition on sapphire |
| 45 | Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching |
| 46 | Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface |
| 47 | Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges |
| 48 | Development and Evaluation of a Nanometer-Scale Hemocompatible and Antithrombotic Coating Technology Platform for Commercial Intracranial Stents and Flow Diverters |
| 49 | Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma |
| 50 | Metal-oxide-based hole-selective tunneling contacts for crystalline silicon solar cells |
| 51 | Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2 |
| 52 | Antireflection Coating on PMMA Substrates by Atomic Layer Deposition |
| 53 | Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell |
| 54 | A high speed PE-ALD ZnO Schottky diode rectifier with low interface-state density |
| 55 | Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices |
| 56 | Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition |
| 57 | Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells |
| 58 | Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide |
| 59 | Plasma-Enhanced Atomic Layer Deposition of AlN Epitaxial Thin Film for AlN/GaN Heterostructure TFTs |
| 60 | Comparative study of ALD SiO2 thin films for optical applications |
| 61 | Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells |
| 62 | Composite materials and nanoporous thin layers made by atomic layer deposition |
| 63 | Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films |
| 64 | Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor |
| 65 | Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties |
| 66 | 'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition |
| 67 | Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition |
| 68 | Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates |
| 69 | Index matching at the nanoscale: light scattering by core-shell Si/SiOx nanowires |
| 70 | Method of Fabrication for Encapsulated Polarizing Resonant Gratings |
