Publication Information

Title:
Composite materials and nanoporous thin layers made by atomic layer deposition
Type:
Conference Proceedings
Info:
Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V
Date:
2015-09-01

Author Information

Name Institution
Lilit GhazaryanFriedrich-Schiller-Universität Jena
Ernst-Bernhard KleyFriedrich-Schiller-Universität Jena
Andreas TünnermannFriedrich-Schiller-Universität Jena
Adriana SzeghalmiFriedrich-Schiller-Universität Jena

Films


Film/Plasma Properties

Characteristic: Etch Rate
Analysis: Custom

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Substrates

Silicon

Keywords

Etch Resistance

Notes

978