Ernst-Bernhard Kley Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ernst-Bernhard Kley returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Composite materials and nanoporous thin layers made by atomic layer deposition
2High-efficiency embedded transmission grating
3Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
4Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
5Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching