Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Ernst-Bernhard Kley Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ernst-Bernhard Kley returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
2Composite materials and nanoporous thin layers made by atomic layer deposition
3Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
4High-efficiency embedded transmission grating
5Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching