Publication Information

Title:
High-efficiency embedded transmission grating
Type:
Conference Proceedings
Info:
Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96271G (September 23, 2015)
Date:
2015-09-07

Author Information

Name Institution
Stephan RatzschFriedrich-Schiller-Universität Jena
Ernst-Bernhard KleyFriedrich-Schiller-Universität Jena
Andreas TünnermannFriedrich-Schiller-Universität Jena
Adriana SzeghalmiFriedrich-Schiller-Universität Jena

Films

Plasma TiO2


Plasma Al2O3


Film/Plasma Properties

Substrates

Si(100)
SiO2

Keywords

Nanolaminate

Notes

483