Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Stephan Ratzsch Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stephan Ratzsch returned 3 record(s).

NumberTitle
1High-efficiency embedded transmission grating
2Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
3Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS