Search 1616 plasma ALD publications by:
3DMASi, (Me2N)3SiH, [(CH3)2N]3SiH, Tris(DiMethylAmido) Silane, CAS# 15112-89-7
Where to buy
|3||Strem Chemicals, Inc.||Tris(dimethylamino)silane, 99+%|
|4||Strem Chemicals, Inc.||Tris(dimethylamino)silane, 99+%, contained in 50 ml cylinder for CVD/ALD|
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Plasma Enhanced Atomic Layer Deposition Film Publications
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