3DMASi, (Me2N)3SiH, [(CH3)2N]3SiH, Tris(DiMethylAmido) Silane, CAS# 15112-89-7

Where to buy

NumberVendorRegionLink
1Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTris(dimethylamino)silane, 99+%, contained in 50 ml cylinder for CVD/ALD
2EreztechπŸ‡ΊπŸ‡ΈTris(dimethylamino) silane
3Pegasus ChemicalsπŸ‡¬πŸ‡§Tris(dimethylamino)silane
4GelestπŸ‡ΊπŸ‡ΈTris(Dimethylamino)Silane
5Strem Chemicals, Inc.πŸ‡ΊπŸ‡ΈTris(dimethylamino)silane, 99+%
6DOCK/CHEMICALSπŸ‡©πŸ‡ͺTris(dimethylamino)silane

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 71 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ Ξ²-Ga2O3
2Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
3Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments
4Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
5Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
6Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
7Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
8Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
9Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors
10Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
11Multiplexed actuation using ultra dielectrophoresis for proteomics applications: a comprehensive electrical and electrothermal design methodology
12Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
13Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
14Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
15Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1-xOy on InGaZnO4
16Engineering Interfacial Silicon Dioxide for Improved Metal-Insulator-Semiconductor Silicon Photoanode Water Splitting Performance
17Localized dielectric breakdown and antireflection coating in metal-oxide-semiconductor photoelectrodes
18Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
19Annealing Effects on the Band Alignment of ALD SiO2 on (InxGa1-x)2O3 for x = 0.25-0.74
20Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
21Optical properties and bandgap evolution of ALD HfSiOx films
22Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
23Band Offsets for Atomic Layer Deposited HfSiO4 on (Al0.14Ga0.86)2O3
243D structure evolution using metastable atomic layer deposition based on planar silver templates
25Photoluminescence and electroluminescence from Ge/strained GeSn/Ge quantum wells
26HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition
27High-Reflective Coatings For Ground and Space Based Applications
28Annealing behavior of ferroelectric Si-doped HfO2 thin films
29Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments
30The effects of layering in ferroelectric Si-doped HfO2 thin films
31Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition
32Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy
33Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
34Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
35Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device
36Irradiation effects of graphene-enhanced gallium nitride (GaN) metal-semiconductor-metal (MSM) ultraviolet photodetectors
37Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
38Band alignment of atomic layer deposited SiO2 and HfSiO4 with $(\bar{2}01)$ Ξ²-Ga2O3
39Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
40Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
41Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
42Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
43Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
44Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
45Effect of Deposition Method on Valence Band Offsets of SiO2 and Al2O3 on (Al0.14Ga0.86)2O3
46Index matching at the nanoscale: light scattering by core-shell Si/SiOx nanowires
47Single-Cell Photonic Nanocavity Probes
48Composite materials and nanoporous thin layers made by atomic layer deposition
49Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
50Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
51Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
52Correlation between SiO2 growth rate and difference in electronegativity of metal-oxide underlayers for plasma enhanced atomic layer deposition using tris(dimethylamino)silane precursor
53Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)2O3
54Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition
55Atomic layer deposition of metal-oxide thin films on cellulose fibers
56Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
57Poly-Si gate electrodes for AlGaN/GaN HEMT with high reliability and low gate leakage current
58Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
59Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics
60Optical properties and bandgap evolution of ALD HfSiOx films
61Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
62Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO2 and Ξ²-Ga2O3 (2̅01)
63Comparative study of ALD SiO2 thin films for optical applications
64Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
65Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
66TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
67Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice
68Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
69Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction
70Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction
71An ultra-thin SiO2 ALD layer for void-free bonding of III-V material on silicon