Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
3DMASi, (Me2N)3SiH, [(CH3)2N]3SiH, Tris(DiMethylAmido) Silane, CAS# 15112-89-7
Where to buy
Number | Vendor | Link |
---|---|---|
1 | Ereztech | Tris(dimethylamino)silane (99.8%-Si) |
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 66 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |