Publication Information

Title:
Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
Type:
Journal
Info:
Coatings 2020, 10, 64
Date:
2020-01-07

Author Information

Name Institution
Pallabi PaulFriedrich-Schiller-Universit├Ąt Jena
Kristin PfeifferFraunhofer Institute for Applied Optics and Precision Engineering
Adriana SzeghalmiFriedrich-Schiller-Universit├Ąt Jena

Films

Plasma Al2O3


Thermal Al2O3


Plasma TiO2


Plasma SiO2


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Reflectivity
Analysis: Optical Reflectivity

Characteristic: Transmittance
Analysis: Optical Transmission

Characteristic: Reflectivity
Analysis: Optical Reflectivity

Characteristic: Adhesion
Analysis: Tape Test

Characteristic: Environmental Testing
Analysis: Environmental Testing

Substrates

PMMA, poly(methyl methacrylate)

Keywords

Adhesion
AR, AntiReflective Coating
Optical
Reflectance

Notes

1432