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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Kristin Pfeiffer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kristin Pfeiffer returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
2Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
3Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
4Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
5Comparative study of ALD SiO2 thin films for optical applications