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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition

Type:
Journal
Info:
Coatings 2017, 7, 118
Date:
2017-08-03
DOI:
http://dx.doi.org/10.3390/coatings7080118

Author Information

Name Institution
Kristin PfeifferFriedrich-Schiller-Universität Jena
Ulrike SchulzFraunhofer Institute for Applied Optics and Precision Engineering
Andreas TünnermannFriedrich-Schiller-Universität Jena
Adriana SzeghalmiFriedrich-Schiller-Universität Jena

Films

Plasma SiO2

Hardware used: Oxford Instruments OpAL
3DMASi, (Me2N)3SiH, [(CH3)2N]3SiH, Tris(DiMethylAmido) Silane
CAS#: 15112-89-7
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 100C

Plasma Al2O3

Hardware used: Oxford Instruments OpAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 100C

Plasma TiO2

Hardware used: Oxford Instruments OpAL
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 100C

Thermal Al2O3

Hardware used: Picosun R200
Hydrogen Peroxide, H2O2
CAS#: 7722-84-1
Where to buy precursor
Deposition Temperature = 300C

Thermal Ta2O5

Hardware used: Picosun R200
Ta(OC2H5)5, Ta(OEt)5, Tantalum(V) ethoxide
CAS#: 6074-84-6
Where to buy precursor
Hydrogen Peroxide, H2O2
CAS#: 7722-84-1
Where to buy precursor
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Refractive Index
Analysis: Spectrophotometry
Diagnostic: -

Characteristic: Reflectivity
Analysis: Optical Reflectivity
Diagnostic: PerkinElmer lambda 950 Spectrophotometer

Characteristic: Transmittance
Analysis: Optical Transmission
Diagnostic: PerkinElmer lambda 950 Spectrophotometer

Substrates

Notes

989