TiO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiO2 films returned 168 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
2Al2O3/TiO2 nanolaminate gate dielectric films with enhanced electrical performances for organic field-effect transistors
3Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
4Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
5Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
6Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
7Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
8In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
9Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition
10Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
11Oxygen migration in TiO2-based higher-k gate stacks
12Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
13Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
14X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect
15Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
16Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
17Biofilm prevention on cochlear implants
18Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
19Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition
20Fluorinated polymer-grafted organic dielectrics for organic field-effect transistors with low-voltage and electrical stability
21Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
22Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
233D-Branched ZnO/CdS Nanowire Arrays for Solar Water Splitting and the Service Safety Research
24Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
25Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
26Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
27Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
28Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
29Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
30Direct observation of microscopic change induced by oxygen vacancy drift in amorphous TiO2 thin films
31Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
32Mesoporous perovskite solar cells and the role of nanoscale compact layers for remarkable all-round high efficiency under both indoor and outdoor illumination
33A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
34Plasma Enhanced Atomic Layer Deposition on Powders
35Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
36Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma
37Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
38Atomic layer deposition TiO2-Al2O3 stack: An improved gate dielectric on Ga-polar GaN metal oxide semiconductor capacitors
39Effect of hydrogen plasma treatment on the passivation performance of TiOx on crystalline silicon prepared by atomic layer deposition
40Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
41Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
42Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
43Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
44The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
45Energy-enhanced atomic layer deposition for more process and precursor versatility
46Low temperature temporal and spatial atomic layer deposition of TiO2 films
47Impact of interface materials on side permeation in indirect encapsulation of organic electronics
48Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
49Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
50Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
51Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
52Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
53Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
54Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
55Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
56The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
57TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
58Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries
59Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
60Electronic Instabilities Leading to Electroformation of Binary Metal Oxide-based Resistive Switches
61Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
62Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
63Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
64Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
65Lithium-Iron (III) Fluoride Battery with Double Surface Protection
66Epitaxial 1D electron transport layers for high-performance perovskite solar cells
67Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
68Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
69Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
70Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
71Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
72Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
73Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
74Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
75Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites
76Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
77Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
78New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers
79High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
80Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition
81Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
82Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
83Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
84Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
85Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
86Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
87Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
88Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
89Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
90Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
91Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
92Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
93Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
94Protective capping and surface passivation of III-V nanowires by atomic layer deposition
95Ion energy control during plasma-enhanced atomic layer deposition: enabling materials control and selective processing in the third dimension
96Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
97The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
98Photo-Patternable ZnO Thin Films Based on Cross-Linked Zinc Acrylate for Organic/Inorganic Hybrid Complementary Inverters
99Fabrication of Highly Ordered and Well-Aligned PbTiO3/TiN Core-Shell Nanotube Arrays
100Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
101In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
102Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
103Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
104An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
105Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
106Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity
107Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
108The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
109Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
110Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
111Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells
112Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
113The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
114Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
115Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
116Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
117Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
118High-efficiency embedded transmission grating
119Plasma-enhanced atomic layer deposition of BaTiO3
120Breakdown and Protection of ALD Moisture Barrier Thin Films
121Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
122Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
123MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
124A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
125Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
126Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
127Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2
128In-gap states in titanium dioxide and oxynitride atomic layer deposited films
129The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
130Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
131Flexible Memristive Memory Array on Plastic Substrates
132Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
133Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
134Room temperature atomic layer deposition of TiO2 on gold nanoparticles
135Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
136Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
137Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
138Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
139Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
140Passivation of Al2O3/TiO2 on monocrystalline Si with relatively low reflectance
141Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
142Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
143Highly efficient and bending durable perovskite solar cells: toward a wearable power source
144Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
145Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
146Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
147Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
148Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
149Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
150Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
151Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions
152Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
153Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
154Tribological properties of thin films made by atomic layer deposition sliding against silicon
155Transient characterization of the electroforming process in TiO2 based resistive switching devices
156Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
157Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
158Bipolar resistive switching in amorphous titanium oxide thin film
159Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
160On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
161Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
162Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
163Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
164Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
165Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
166Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
167Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
168Study on the resistive switching time of TiO2 thin films