TiO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiO2 films returned 161 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

13D-Branched ZnO/CdS Nanowire Arrays for Solar Water Splitting and the Service Safety Research
2A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
3A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
4Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
5Al2O3/TiO2 nanolaminate gate dielectric films with enhanced electrical performances for organic field-effect transistors
6An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
7Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
8Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
9Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
10Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
11Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
12Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
13Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
14Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
15Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
16Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
17Atomic layer deposition TiO2-Al2O3 stack: An improved gate dielectric on Ga-polar GaN metal oxide semiconductor capacitors
18Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
19Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
20Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
21Biofilm prevention on cochlear implants
22Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition
23Bipolar resistive switching in amorphous titanium oxide thin film
24Breakdown and Protection of ALD Moisture Barrier Thin Films
25Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
26Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
27Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
28Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
29Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
30Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
31Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
32Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
33Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
34Direct observation of microscopic change induced by oxygen vacancy drift in amorphous TiO2 thin films
35Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
36Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
37Effect of hydrogen plasma treatment on the passivation performance of TiOx on crystalline silicon prepared by atomic layer deposition
38Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
39Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells
40Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
41Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
42Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
43Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
44Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
45Electronic Instabilities Leading to Electroformation of Binary Metal Oxide-based Resistive Switches
46Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
47Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
48Energy-enhanced atomic layer deposition for more process and precursor versatility
49Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
50Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
51Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
52Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
53Epitaxial 1D electron transport layers for high-performance perovskite solar cells
54Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
55Fabrication of Highly Ordered and Well-Aligned PbTiO3/TiN Core-Shell Nanotube Arrays
56Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
57Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
58Flexible Memristive Memory Array on Plastic Substrates
59Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
60Fluorinated polymer-grafted organic dielectrics for organic field-effect transistors with low-voltage and electrical stability
61Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
62Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
63Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
64Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
65Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
66Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition
67Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
68Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
69High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
70High-efficiency embedded transmission grating
71Highly efficient and bending durable perovskite solar cells: toward a wearable power source
72Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
73Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
74Impact of interface materials on side permeation in indirect encapsulation of organic electronics
75Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
76Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
77Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
78In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
79In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
80In-gap states in titanium dioxide and oxynitride atomic layer deposited films
81Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
82Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
83Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
84Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
85Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
86Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
87Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
88Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
89Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
90Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
91Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
92Lithium-Iron (III) Fluoride Battery with Double Surface Protection
93Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
94Low temperature temporal and spatial atomic layer deposition of TiO2 films
95Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
96Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
97Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
98Mesoporous perovskite solar cells and the role of nanoscale compact layers for remarkable all-round high efficiency under both indoor and outdoor illumination
99Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
100Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
101MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
102Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
103New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers
104On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
105Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
106Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
107Oxygen migration in TiO2-based higher-k gate stacks
108Passivation of Al2O3/TiO2 on monocrystalline Si with relatively low reflectance
109Photo-Patternable ZnO Thin Films Based on Cross-Linked Zinc Acrylate for Organic/Inorganic Hybrid Complementary Inverters
110Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
111Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
112Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites
113Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries
114Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
115Plasma Enhanced Atomic Layer Deposition on Powders
116Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
117Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
118Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
119Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
120Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
121Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
122Plasma-enhanced atomic layer deposition of BaTiO3
123Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
124Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
125Protective capping and surface passivation of III-V nanowires by atomic layer deposition
126Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
127Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
128Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
129Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
130Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
131Room temperature atomic layer deposition of TiO2 on gold nanoparticles
132Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
133Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
134Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
135Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
136Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
137Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
138Study on the resistive switching time of TiO2 thin films
139Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
140Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
141Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
142Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma
143Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
144Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
145The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
146The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
147The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
148The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
149The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
150Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions
151Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
152Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
153Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
154Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
155TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
156Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity
157Transient characterization of the electroforming process in TiO2 based resistive switching devices
158Tribological properties of thin films made by atomic layer deposition sliding against silicon
159Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
160Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
161X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect