TiO₂ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiO₂ films returned 127 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	3D-Branched ZnO/CdS Nanowire Arrays for Solar Water Splitting and the Service Safety Research
2	A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
3	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
4	Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
5	Al2O3/TiO2 nanolaminate gate dielectric films with enhanced electrical performances for organic field-effect transistors
6	An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
7	Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
8	Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
9	Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
10	Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
11	Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
12	Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
13	Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
14	Atomic layer deposition TiO2-Al2O3 stack: An improved gate dielectric on Ga-polar GaN metal oxide semiconductor capacitors
15	Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
16	Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
17	Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
18	Biofilm prevention on cochlear implants
19	Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition
20	Bipolar resistive switching in amorphous titanium oxide thin film
21	Breakdown and Protection of ALD Moisture Barrier Thin Films
22	Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
23	Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
24	Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
25	Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
26	Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
27	Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
28	Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
29	Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
30	Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
31	Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
32	Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
33	Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells
34	Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
35	Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
36	Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
37	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
38	Electronic Instabilities Leading to Electroformation of Binary Metal Oxide-based Resistive Switches
39	Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
40	Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
41	Energy-enhanced atomic layer deposition for more process and precursor versatility
42	Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
43	Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
44	Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
45	Epitaxial 1D electron transport layers for high-performance perovskite solar cells
46	Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
47	Fabrication of Highly Ordered and Well-Aligned PbTiO3/TiN Core-Shell Nanotube Arrays
48	Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
49	Flexible Memristive Memory Array on Plastic Substrates
50	Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
51	Fluorinated polymer-grafted organic dielectrics for organic field-effect transistors with low-voltage and electrical stability
52	Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
53	Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
54	Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
55	Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
56	Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
57	High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
58	High-efficiency embedded transmission grating
59	Highly efficient and bending durable perovskite solar cells: toward a wearable power source
60	Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
61	Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
62	Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
63	In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
64	In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
65	In-gap states in titanium dioxide and oxynitride atomic layer deposited films
66	Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
67	Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
68	Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
69	Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
70	Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
71	Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
72	Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
73	Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
74	Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
75	Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
76	Low temperature temporal and spatial atomic layer deposition of TiO2 films
77	Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
78	Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
79	Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
80	Mesoporous perovskite solar cells and the role of nanoscale compact layers for remarkable all-round high efficiency under both indoor and outdoor illumination
81	Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
82	Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
83	New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers
84	On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
85	Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
86	Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
87	Oxygen migration in TiO2-based higher-k gate stacks
88	Passivation of Al2O3/TiO2 on monocrystalline Si with relatively low reflectance
89	Photo-Patternable ZnO Thin Films Based on Cross-Linked Zinc Acrylate for Organic/Inorganic Hybrid Complementary Inverters
90	Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
91	Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
92	Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites
93	Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
94	Plasma Enhanced Atomic Layer Deposition on Powders
95	Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
96	Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
97	Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
98	Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
99	Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
100	Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
101	Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
102	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
103	Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
104	Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
105	Room temperature atomic layer deposition of TiO2 on gold nanoparticles
106	Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
107	Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
108	Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
109	Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
110	Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
111	Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
112	Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma
113	Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
114	Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
115	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
116	The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
117	The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
118	Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions
119	Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
120	Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
121	Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
122	TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
123	Transient characterization of the electroforming process in TiO2 based resistive switching devices
124	Tribological properties of thin films made by atomic layer deposition sliding against silicon
125	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
126	Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
127	X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect

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