TiO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiO2 films returned 168 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
2Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
3Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
4X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect
5Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
6Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
7Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
8Impact of interface materials on side permeation in indirect encapsulation of organic electronics
9Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
10Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
11Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
12Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
13The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
14Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
15Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
16Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
17On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
18Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
19Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
20Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
21Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
22Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
23Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
24Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition
25The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
26Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
27Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
28Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
29Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries
30Atomic layer deposition TiO2-Al2O3 stack: An improved gate dielectric on Ga-polar GaN metal oxide semiconductor capacitors
31Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
32Ion energy control during plasma-enhanced atomic layer deposition: enabling materials control and selective processing in the third dimension
33In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
34Effect of hydrogen plasma treatment on the passivation performance of TiOx on crystalline silicon prepared by atomic layer deposition
35Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
36Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
37Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
38Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
39Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
40Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
41Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
42Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions
433D-Branched ZnO/CdS Nanowire Arrays for Solar Water Splitting and the Service Safety Research
44Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
45An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
46A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
47Energy-enhanced atomic layer deposition for more process and precursor versatility
48Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
49Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
50Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
51Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
52High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
53Electronic Instabilities Leading to Electroformation of Binary Metal Oxide-based Resistive Switches
54Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
55The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
56Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
57MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
58Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
59Direct observation of microscopic change induced by oxygen vacancy drift in amorphous TiO2 thin films
60Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
61Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
62Passivation of Al2O3/TiO2 on monocrystalline Si with relatively low reflectance
63Bipolar resistive switching in amorphous titanium oxide thin film
64Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells
65The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
66Photo-Patternable ZnO Thin Films Based on Cross-Linked Zinc Acrylate for Organic/Inorganic Hybrid Complementary Inverters
67Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition
68Protective capping and surface passivation of III-V nanowires by atomic layer deposition
69Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
70High-efficiency embedded transmission grating
71Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
72Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
73Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
74Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
75Room temperature atomic layer deposition of TiO2 on gold nanoparticles
76Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
77Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
78Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
79Epitaxial 1D electron transport layers for high-performance perovskite solar cells
80Study on the resistive switching time of TiO2 thin films
81Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity
82Biofilm prevention on cochlear implants
83Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
84Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
85Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
86Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
87Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
88Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
89Fabrication of Highly Ordered and Well-Aligned PbTiO3/TiN Core-Shell Nanotube Arrays
90Al2O3/TiO2 nanolaminate gate dielectric films with enhanced electrical performances for organic field-effect transistors
91Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
92Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
93Lithium-Iron (III) Fluoride Battery with Double Surface Protection
94Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
95Tribological properties of thin films made by atomic layer deposition sliding against silicon
96Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
97Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
98Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
99Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
100Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition
101In-gap states in titanium dioxide and oxynitride atomic layer deposited films
102Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
103Fluorinated polymer-grafted organic dielectrics for organic field-effect transistors with low-voltage and electrical stability
104Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
105Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
106Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
107Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
108Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
109Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma
110Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
111Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
112The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
113Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
114Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
115Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
116Breakdown and Protection of ALD Moisture Barrier Thin Films
117Plasma Enhanced Atomic Layer Deposition on Powders
118Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
119Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
120Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
121Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
122Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
123Oxygen migration in TiO2-based higher-k gate stacks
124TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
125Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
126Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
127Plasma-enhanced atomic layer deposition of BaTiO3
128Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
129The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
130Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
131Flexible Memristive Memory Array on Plastic Substrates
132Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
133Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
134Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
135Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
136Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
137New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers
138Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites
139Low temperature temporal and spatial atomic layer deposition of TiO2 films
140Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
141In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
142Transient characterization of the electroforming process in TiO2 based resistive switching devices
143Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
144Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
145Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
146Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
147Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
148Highly efficient and bending durable perovskite solar cells: toward a wearable power source
149Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
150Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
151Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
152Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
153Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
154Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
155Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
156Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
157Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
158A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
159Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
160Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
161Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2
162Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
163Mesoporous perovskite solar cells and the role of nanoscale compact layers for remarkable all-round high efficiency under both indoor and outdoor illumination
164Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
165Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
166Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
167Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
168Atomic structure of conducting nanofilaments in TiO2 resistive switching memory