TiO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiO2 films returned 168 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
2Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
3Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
4Plasma-enhanced atomic layer deposition of BaTiO3
5Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition
6Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
7Low temperature temporal and spatial atomic layer deposition of TiO2 films
8Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity
9Photo-Patternable ZnO Thin Films Based on Cross-Linked Zinc Acrylate for Organic/Inorganic Hybrid Complementary Inverters
10Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
11MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
12Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
13Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
14Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
15Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
16Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
17Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
18Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
19Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
20Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
21Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
22Fabrication of Highly Ordered and Well-Aligned PbTiO3/TiN Core-Shell Nanotube Arrays
23Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
24Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
25Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries
26Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
27Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
28Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition
29Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
30Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
31Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
32Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
33Study on the resistive switching time of TiO2 thin films
34The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
35Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
36Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
37Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
38Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
39High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
40Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
413D-Branched ZnO/CdS Nanowire Arrays for Solar Water Splitting and the Service Safety Research
42Biofilm prevention on cochlear implants
43Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
44Mesoporous perovskite solar cells and the role of nanoscale compact layers for remarkable all-round high efficiency under both indoor and outdoor illumination
45Protective capping and surface passivation of III-V nanowires by atomic layer deposition
46Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
47Direct observation of microscopic change induced by oxygen vacancy drift in amorphous TiO2 thin films
48Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
49Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
50Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
51Breakdown and Protection of ALD Moisture Barrier Thin Films
52Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
53Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2
54Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
55Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
56Energy-enhanced atomic layer deposition for more process and precursor versatility
57Oxygen migration in TiO2-based higher-k gate stacks
58Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
59Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
60Plasma Enhanced Atomic Layer Deposition on Powders
61Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
62A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
63An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
64Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
65Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells
66A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
67Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
68Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
69Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
70In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
71In-gap states in titanium dioxide and oxynitride atomic layer deposited films
72X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect
73Opportunities of Atomic Layer Deposition for Perovskite Solar Cells
74Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
75Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition
76Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
77Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
78Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
79Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
80The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
81Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
82Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
83Room temperature atomic layer deposition of TiO2 on gold nanoparticles
84Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
85Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
86Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
87Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
88Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
89Surface Etching of TiO2 Thin Films Using High Density Cl2/Ar Plasma
90Highly efficient and bending durable perovskite solar cells: toward a wearable power source
91Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
92Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
93Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO2 Scaffolds on Plastic Substrates
94Flexible Memristive Memory Array on Plastic Substrates
95Passivation of Al2O3/TiO2 on monocrystalline Si with relatively low reflectance
96Lithium-Iron (III) Fluoride Battery with Double Surface Protection
97Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
98Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
99Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
100Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
101On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
102Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
103Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
104Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
105Epitaxial 1D electron transport layers for high-performance perovskite solar cells
106Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
107Electronic Instabilities Leading to Electroformation of Binary Metal Oxide-based Resistive Switches
108Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites
109Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
110Fluorinated polymer-grafted organic dielectrics for organic field-effect transistors with low-voltage and electrical stability
111Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
112The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
113The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
114Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
115Impact of interface materials on side permeation in indirect encapsulation of organic electronics
116Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
117Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
118Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
119Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
120Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
121Bipolar resistive switching in amorphous titanium oxide thin film
122Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions
123Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
124Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
125Ion energy control during plasma-enhanced atomic layer deposition: enabling materials control and selective processing in the third dimension
126Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
127Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
128Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
129Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
130In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
131Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
132Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
133Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
134Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
135Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
136Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
137Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
138Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
139Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
140Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
141The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
142Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
143Effect of hydrogen plasma treatment on the passivation performance of TiOx on crystalline silicon prepared by atomic layer deposition
144Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
145Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
146Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
147Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
148Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
149Atomic layer deposition TiO2-Al2O3 stack: An improved gate dielectric on Ga-polar GaN metal oxide semiconductor capacitors
150Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
151High-efficiency embedded transmission grating
152New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers
153Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
154The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
155Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
156Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
157Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
158TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
159Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
160Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
161Tribological properties of thin films made by atomic layer deposition sliding against silicon
162Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
163Al2O3/TiO2 nanolaminate gate dielectric films with enhanced electrical performances for organic field-effect transistors
164Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
165Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
166Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
167Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
168Transient characterization of the electroforming process in TiO2 based resistive switching devices