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Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Gallium nitride thin films by microwave plasma-assisted ALD
Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
Type:
Journal
Info:
OPTICAL MATERIALS EXPRESS, Vol. 5, No. 1, 1 Jan 2015.
Date:
2014-12-05
Author Information
| Name | Institution |
|---|---|
| Thomas Paul | Fraunhofer Institute for Applied Optics and Precision Engineering |
Films
Film/Plasma Properties
Substrates
Notes
| 212 |