Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
Publication Information
Title:
Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
Type:
Journal
Info:
OPTICAL MATERIALS EXPRESS, Vol. 5, No. 1, 1 Jan 2015.
Date:
2014-12-05
Author Information
Name | Institution |
---|---|
Thomas Paul | Fraunhofer Institute for Applied Optics and Precision Engineering |
Films
Film/Plasma Properties
Substrates
Keywords
Notes
212 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |