Publication Information

Title: Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings

Type: Journal

Info: OPTICAL MATERIALS EXPRESS, Vol. 5, No. 1, 1 Jan 2015.

Date: 2014-12-05

DOI: http://dx.doi.org/10.1364/OME.5.000124

Author Information

Name

Institution

Fraunhofer Institute for Applied Optics and Precision Engineering

Films

Plasma TiO2 using Unknown

Deposition Temperature = 100C

546-68-9

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

212



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