Search Plasma ALD Publication Database By...

Publication Information

Title: Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification

Type: Journal

Info: Journal of Membrane Science and Research 3 (2017) 64--70

Date: 2016-06-26

DOI: http://dx.doi.org/10.22079/jmsr.2016.20345

Author Information

Name

Institution

Colorado School of Mines

Colorado School of Mines

Films

Plasma TiO2 using Custom

Deposition Temperature = 70C

7550-45-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam VASE

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

JEOL JSM-7000F

Substrates

Polycarbonate

Isopore

Keywords

Notes

990



Shortcuts



© 2014-2018 plasma-ald.com