The publication database currently has 1556 entries.
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191 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses
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Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
AlN PEALD with TMA and forming gas: study of plasma reaction mechanisms
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Where to buy TiCl4, Titanium Tetrachloride
TiCl4, Titanium Tetrachloride is available from the following source(s):
| Number | Vendor | Link |
|---|---|---|
| 1 | Strem Chemicals, Inc. | Titanium(IV) chloride, 99%, contained in 50 ml cylinder for CVD/ALD |
| 2 | Sigma-Aldrich, Co. LLC | Titanium(IV) chloride |
| 3 | Strem Chemicals, Inc. | Titanium(IV) chloride, (99.99+%-Ti) PURATREM |
| 4 | Strem Chemicals, Inc. | Titanium(IV) chloride, 99% |
| 5 | Gelest | Titanium Tetrachloride, 99% |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |