Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2015, 7 (19), pp 10228-10237
Date:
2015-04-28

Author Information

Name Institution
Wei-Cheng WangNational Taiwan University
Meng-Chen TsaiNational Taiwan University
Jason YangSunrise Global Solar Energy Co.
Chuck HsuSino-American Silicon Products Inc.
Miin-Jang ChenNational Taiwan University

Films

Thermal Al2O3



Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Reflectance Spectra
Analysis: Reflection Spectroscopy

Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Interface State Density
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Fixed Charge
Analysis: C-V, Capacitance-Voltage Measurements

Characteristic: Minority Carrier Lifetime
Analysis: QSSPC, Quasi-Steady-State PhotoConductance Decay

Substrates

Si(100)
NBSi, Nanotextured Black Silicon

Keywords

Solar
Passivation

Notes

Ultratech Fiji thermal Al2O3/plasma TiO2 for silicon solar passivation.
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