Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
TDMATi, (Me2N)4Ti, [(CH3)2N]4Ti, Tetrakis (DiMethylAmido) Titanium, Titanium Dimethylamide, CAS# 3275-24-9
Where to buy
Number | Vendor | Link |
---|---|---|
1 | Ereztech | Tetrakis(dimethylamino)titanium(IV) (99.9%-Ti) |
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 122 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |