TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti, CAS# 3275-24-9

Where to buy

NumberVendorRegionLink
1Ereztech๐Ÿ‡บ๐Ÿ‡ธTetrakis(dimethylamino)titanium(IV) (99.9%-Ti)
2Entegris๐Ÿ‡บ๐Ÿ‡ธTDMAT
3Strem Chemicals, Inc.๐Ÿ‡บ๐Ÿ‡ธTetrakis(dimethylamino)titanium(IV), 99% TDMAT, contained in 50 ml cylinder for CVD/ALD
4DOCK/CHEMICALS๐Ÿ‡ฉ๐Ÿ‡ชTetrakisdimethylamidotitanium
5Strem Chemicals, Inc.๐Ÿ‡บ๐Ÿ‡ธTetrakis(dimethylamino)titanium(IV), 99% TDMAT, contained in 50 ml cylinder with high temperature valve for CVD/ALD
6Strem Chemicals, Inc.๐Ÿ‡บ๐Ÿ‡ธTetrakis(dimethylamino)titanium(IV), 99% TDMAT
7Pegasus Chemicals๐Ÿ‡ฌ๐Ÿ‡งTetrakis(dimethylamido)titanium(IV)
8Strem Chemicals, Inc.๐Ÿ‡บ๐Ÿ‡ธTetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti) PURATREM
9Gelest๐Ÿ‡บ๐Ÿ‡ธTitanium Tetrakis(Dimethylamide), 99+%

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 149 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3/TiO2 Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition
2Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights
3Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
4Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition
5Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
6Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
7Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
8Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
9Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
10Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
11Interrogation of Electrochemical Properties of Polymer Electrolyte Thin Films with Interdigitated Electrodes
12Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications
13Approximation of PE-MOCVD to ALD for TiN Concerning Resistivity and Chemical Composition
14Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films
15Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
16Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
17Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
18Atomic layer deposition of titanium nitride for quantum circuits
19Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
20Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
21Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
22The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
23Effect of hydrogen plasma treatment on the passivation performance of TiOx on crystalline silicon prepared by atomic layer deposition
24Control of ion energy during plasma enhanced atomic layer deposition: A new strategy for the modulation of TiN growth delay on SiO2
25Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
26In0.53Ga0.47As FinFET and GAA-FET With Remote-Plasma Treatment
27Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects
28ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
29Atomic layer deposition of titanium nitride from TDMAT precursor
30Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
31Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
32Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry
33Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
34Ion energy control during plasma-enhanced atomic layer deposition: enabling materials control and selective processing in the third dimension
35Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
36Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
37Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
38Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
39Growth Temperature Dependence of TiO2 Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
40Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
41The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology
42Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
43Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
44Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates
45Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
46Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes
47Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
48Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect
49Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
50Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
51Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications
52Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
53Oxygen Recombination Probability Data for Plasma-Assisted Atomic Layer Deposition of SiO2 and TiO2
54Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
55Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
56Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
57Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
58Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition
59Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
60Texture of atomic layer deposited ruthenium
61Nonvolatile Capacitive Crossbar Array for In-Memory Computing
62Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
63Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
64Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
65Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
66Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
67Low-temperature (โ‰ค200ยฐC) plasma enhanced atomic layer deposition of dense titanium nitride thin films
68Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
69Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
70Electrical and Corrosion Properties of Titanium Aluminum Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
71Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization
72ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
73Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
74Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
75Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
76Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
77Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights
78X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect
79A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
80Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
81RF Characterization of Novel Superconducting Materials and Multilayers
82The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
83Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200ยฐC
84Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
85Sub-10-nm ferroelectric Gd-doped HfO2 layers
86Plasma-enhanced atomic layer deposition of titanium vanadium nitride
87Scaled, Ferroelectric Memristive Synapse for Back-End-of-Line Integration with Neuromorphic Hardware
88Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
89In-gap states in titanium dioxide and oxynitride atomic layer deposited films
90Analysis of nitrogen species in titanium oxynitride ALD films
91Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
92Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
93Room temperature atomic layer deposition of TiO2 on gold nanoparticles
94Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
95Sub-0.5 nm Equivalent Oxide Thickness Scaling for Si-Doped Zr1-xHfxO2 Thin Film without Using Noble Metal Electrode
96Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
97Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
98Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
99Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
100Obtaining low resistivity (~100 ยตฮฉ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
101Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
102Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
103Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
104Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
105The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
106ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
107Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
108Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
109Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
110Biofilm prevention on cochlear implants
111Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method
112Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
113Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology
114Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100ยฐC through Control of Plasma Chemistry
115Impact of interface materials on side permeation in indirect encapsulation of organic electronics
116Transient characterization of the electroforming process in TiO2 based resistive switching devices
117Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
118Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
119Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
120Plasma-enhanced atomic layer deposition of titanium vanadium nitride
121Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
122Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
123Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
124Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks
125Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
126Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
127Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes
128Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
129Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases
130Low-frequency dielectric properties of intrinsic and Al-doped rutile TiO2 thin films grown by the atomic layer deposition technique
131Lithium-Iron (III) Fluoride Battery with Double Surface Protection
132Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
133Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
134Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
135On the determination of ฯ‡(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
136High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
137Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
138Annealing behavior of ferroelectric Si-doped HfO2 thin films
139Fully CMOS-compatible titanium nitride nanoantennas
140Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
141Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
142Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter
143Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
144Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
145Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
146Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
147Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2
148Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
149Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells