TDMATi, (Me2N)4Ti, [(CH3)2N]4Ti, Tetrakis(DiMethylAmido) Titaniium, Titanium Dimethylamide, CAS# 3275-24-9

Where to buy

NumberVendorLink
1EreztechTetrakis(dimethylamino)titanium(IV) (99.9%-Ti)
2Strem Chemicals, Inc.Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, contained in 50 ml cylinder with high temperature valve for CVD/ALD
3EntegrisTDMAT
4Strem Chemicals, Inc.Tetrakis(dimethylamino)titanium(IV), 99% TDMAT
5Strem Chemicals, Inc.Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, contained in 50 ml cylinder for CVD/ALD
6GelestTitanium Tetrakis(Dimethylamide), 99+%
7Strem Chemicals, Inc.Tetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti) PURATREM

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 97 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3/TiO2 Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition
2Low-frequency dielectric properties of intrinsic and Al-doped rutile TiO2 thin films grown by the atomic layer deposition technique
3Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
4Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
5Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
6Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
7Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
8Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
9Electrical and Corrosion Properties of Titanium Aluminum Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
10Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
11Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases
12Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications
13ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
14ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
15Annealing behavior of ferroelectric Si-doped HfO2 thin films
16Approximation of PE-MOCVD to ALD for TiN Concerning Resistivity and Chemical Composition
17Atomic layer deposition of titanium nitride for quantum circuits
18Atomic layer deposition of titanium nitride from TDMAT precursor
19Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes
20Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method
21Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates
22Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
23Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
24Fully CMOS-compatible titanium nitride nanoantennas
25High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
26Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
27In0.53Ga0.47As FinFET and GAA-FET With Remote-Plasma Treatment
28Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology
29Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
30Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
31Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
32Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
33Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
34Plasma-enhanced atomic layer deposition of titanium vanadium nitride
35Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects
36Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization
37Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
38Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration
39Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
40Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
41Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
42Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
43Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films
44Sub-0.5 nm Equivalent Oxide Thickness Scaling for Si-Doped Zr1-xHfxO2 Thin Film without Using Noble Metal Electrode
45Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
46Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
47Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
48Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry
49Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
50Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications
51Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
52A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
53Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
54Analysis of dispersive interactions at polymer/TiAlN interfaces by means of dynamic force spectroscopy
55Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
56Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
57Biofilm prevention on cochlear implants
58Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
59Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
60Effects of TiO2 Interfacial Atomic Layers on Device Performances and Exciton Dynamics in ZnO Nanorod Polymer Solar Cells
61Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
62Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
63Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
64Employing Overlayers To Improve the Performance of Cu2BaSnS4 Thin Film based Photoelectrochemical Water Reduction Devices
65Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
66Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
67Impedance spectroscopy analysis on the effects of TiO2 interfacial atomic layers in ZnO nanorod polymer solar cells: Effects of interfacial charge extraction on diffusion and recombination
68Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
69Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
70Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
71Investigation of ultra-thin titania films as hole-blocking contacts for organic photovoltaics
72Large area photoelectrodes based on hybrids of CNT fibres and ALD-grown TiO2
73Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
74On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
75Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition
76Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
77Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
78Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
79Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications
80Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
81Room temperature atomic layer deposition of TiO2 on gold nanoparticles
82Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
83Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting
84The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
85The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
86Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
87Transient characterization of the electroforming process in TiO2 based resistive switching devices
88Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
89Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
90X-ray Photoelectron Spectroscopy Analyses of Atomic Layer Deposition-Prepared Titanium-Dioxide Thin Films with Oxygen Sources and Their Annealing Effect
91Analysis of nitrogen species in titanium oxynitride ALD films
92Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
93In-gap states in titanium dioxide and oxynitride atomic layer deposited films
94Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
95Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
96Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
97Plasma-enhanced atomic layer deposition of titanium vanadium nitride


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