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Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter
Type:
Journal
Info:
Nanomaterials 2020, 10, 409
Date:
2020-02-20
Author Information
| Name | Institution |
|---|---|
| Seokjung Yun | Korea Advanced Institute of Science and Technology |
| Sangjoon Kim | Korea Research Institute of Chemical Technology |
| Jaesung Youn | Korea Advanced Institute of Science and Technology |
| Hoon Kim | Korea Advanced Institute of Science and Technology |
| Jeongjae Ryu | Korea Advanced Institute of Science and Technology |
| Changdeuck Bae | Sungkyunkwan University |
| Kwangsoo No | Korea Advanced Institute of Science and Technology |
| Seungbum Hong | Korea Advanced Institute of Science and Technology |
Films
Plasma TiN
Film/Plasma Properties
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Conductivity
Analysis: AFM, Atomic Force Microscopy
Substrates
| AAO, Anodic Aluminum Oxide |
Notes
| 1461 |