Publication Information

Title:
Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter
Type:
Journal
Info:
Nanomaterials 2020, 10, 409
Date:
2020-02-20

Author Information

Name Institution
Seokjung YunKorea Advanced Institute of Science and Technology
Sangjoon KimKorea Research Institute of Chemical Technology
Jaesung YounKorea Advanced Institute of Science and Technology
Hoon KimKorea Advanced Institute of Science and Technology
Jeongjae RyuKorea Advanced Institute of Science and Technology
Changdeuck BaeSungkyunkwan University
Kwangsoo NoKorea Advanced Institute of Science and Technology
Seungbum HongKorea Advanced Institute of Science and Technology

Films


Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Conductivity
Analysis: AFM, Atomic Force Microscopy

Substrates

AAO, Anodic Aluminum Oxide

Keywords

Flexible Circuits

Notes

1461