Inductively coupled plasma sources from Plasma ALD, LLC.


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Jaesung Youn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaesung Youn returned 1 record(s).

NumberTitle
1Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter