Publication Information

Title: Fully CMOS-compatible titanium nitride nanoantennas

Type: Journal

Info: Applied Physics Letters 108, 051110 (2016)

Date: 2016-01-24

DOI: http://dx.doi.org/10.1063/1.4941413

Author Information

Name

Institution

Stanford University

Stanford University

Stanford University

Stanford University

Stanford University

Stanford University

Films

Deposition Temperature = 250C

3275-24-9

7727-37-9

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Optical Properties

Ellipsometry

J.A. Woollam VASE

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

PHI VersaProbe 5000

Compositional Depth Profiling

XPS, X-ray Photoelectron Spectroscopy

PHI VersaProbe 5000

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Synchrotron

Resistivity, Sheet Resistance

van der Pauw sheet resistance

Unknown

Resistivity, Sheet Resistance

van der Pauw sheet resistance

Unknown

Substrates

MgO

Keywords

Notes

Good information in supplement.

763



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