| 1 | Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN |
| 2 | Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies |
| 3 | Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating |
| 4 | Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics |
| 5 | TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition |
| 6 | Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications |
| 7 | Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights |
| 8 | DIBL in enhanced dynamic threshold operation of UTBB SOI with different drain engineering at high temperatures |
| 9 | Reliability testing of high aspect ratio through silicon vias fabricated with atomic layer deposition barrier, seed layer and direct plating and material properties characterization of electrografted insulator, barrier and seed layer for 3-D integration |
| 10 | Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition |
| 11 | Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions |
| 12 | Comparison of the Low-Frequency Noise of Bulk Triple-Gate FinFETs With and Without Dynamic Threshold Operation |
| 13 | Excellent resistive switching properties of atomic layer-deposited Al2O3/HfO2/Al2O3 trilayer structures for non-volatile memory applications |
| 14 | A high-density carbon fiber neural recording array technology |
| 15 | Plasma Enhanced Atomic Layer Deposition on Powders |
| 16 | Fabrication of Highly Ordered and Well-Aligned PbTiO3/TiN Core-Shell Nanotube Arrays |
| 17 | Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor |
| 18 | Fabrication and deformation of three-dimensional hollow ceramic nanostructures |
| 19 | Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films |
| 20 | Texture of atomic layer deposited ruthenium |
| 21 | Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources |
| 22 | Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality |
| 23 | Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes |
| 24 | Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization |
| 25 | Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method |
| 26 | Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient |
| 27 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
| 28 | Control of ion energy during plasma enhanced atomic layer deposition: A new strategy for the modulation of TiN growth delay on SiO2 |
| 29 | Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor |
| 30 | Electrodynamic response and local tunneling spectroscopy of strongly disordered superconducting TiN films |
| 31 | Atomic layer deposition of TiN for the fabrication of nanomechanical resonators |
| 32 | Mechanical characterization of hollow ceramic nanolattices |
| 33 | Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition |
| 34 | Understanding and optimizing the floating body retention in FDSOI UTBOX |
| 35 | Plasma-enhanced atomic layer deposition of titanium vanadium nitride |
| 36 | Nitride memristors |
| 37 | ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors |
| 38 | Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect |
| 39 | Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition |
| 40 | Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing |
| 41 | Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition |
| 42 | Growth mechanism and diffusion barrier property of plasma-enhanced atomic layer deposition Ti-Si-N thin films |
| 43 | Controlling the composition of Ti1-xAlxN thin films by modifying the number of TiN and AlN subcycles in atomic layer deposition |
| 44 | The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology |
| 45 | Fully CMOS BEOL compatible HfO2 RRAM cell, with low (μA) program current, strong retention and high scalability, using an optimized plasma enhanced atomic layer deposition (PEALD) process for TiN electrode |
| 46 | Plasma-enhanced atomic layer deposition for plasmonic TiN |
| 47 | Fundamental beam studies of radical enhanced atomic layer deposition of TiN |
| 48 | New materials for memristive switching |
| 49 | Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry |
| 50 | ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors |
| 51 | Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT) |
| 52 | Atomic layer deposition of titanium nitride from TDMAT precursor |
| 53 | Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride |
| 54 | TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD |
| 55 | Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays |
| 56 | Investigation of Bulk and DTMOS triple-gate devices under 60 MeV proton irradiation |
| 57 | Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride |
| 58 | Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights |
| 59 | Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition |
| 60 | Bipolar Resistive Switching Characteristics of HfO2/TiO2/HfO2 Trilayer-Structure RRAM Devices on Pt and TiN-Coated Substrates Fabricated by Atomic Layer Deposition |
| 61 | Electron Transport Across Ultrathin Ferroelectric Hf0.5Zr0.5O2 Films on Si |
| 62 | Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition |
| 63 | NiCO2O4@TiN Core-shell Electrodes through Conformal Atomic Layer Deposition for All-solid-state Supercapacitors |
| 64 | Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films |
| 65 | Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects |
| 66 | Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes |
| 67 | Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells |
| 68 | In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential |
| 69 | Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN |
| 70 | Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition |
| 71 | Approximation of PE-MOCVD to ALD for TiN Concerning Resistivity and Chemical Composition |
| 72 | Film Uniformity in Atomic Layer Deposition |
| 73 | Sub-10-nm ferroelectric Gd-doped HfO2 layers |
| 74 | Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma |
| 75 | Plasma-Enhanced ALD of Titanium-Silicon-Nitride Using TiCl4 , SiH4, and N2/H2/Ar Plasma |
| 76 | A scaled replacement metal gate InGaAs-on-Insulator n-FinFET on Si with record performance |
| 77 | Damage free Ar ion plasma surface treatment on In0.53Ga0.47As-on-silicon metal-oxide-semiconductor device |
| 78 | Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications |
| 79 | Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films |
| 80 | Extensionless UTBB FDSOI Devices in Enhanced Dynamic Threshold Mode under Low Power Point of View |
| 81 | Silicon nanowire networks for multi-stage thermoelectric modules |
| 82 | Tribological properties of thin films made by atomic layer deposition sliding against silicon |
| 83 | ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices |
| 84 | In0.53Ga0.47As FinFET and GAA-FET With Remote-Plasma Treatment |
| 85 | Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes |
| 86 | Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors |
| 87 | Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique |
| 88 | Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material |
| 89 | Non-destructive acoustic metrology and void detection in 3x50μm TSV |
| 90 | High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition |
| 91 | Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories |
| 92 | Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition |
| 93 | Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications |
| 94 | Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity |
| 95 | Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications |
| 96 | Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology |
| 97 | Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor |
| 98 | Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications |
| 99 | Atomic layer deposition of titanium nitride for quantum circuits |
| 100 | In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition |
| 101 | Protective capping and surface passivation of III-V nanowires by atomic layer deposition |
| 102 | Improved retention times in UTBOX nMOSFETs for 1T-DRAM applications |
| 103 | Microwave properties of superconducting atomic-layer deposited TiN films |
| 104 | Fully CMOS-compatible titanium nitride nanoantennas |
| 105 | Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry |
| 106 | Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3 |
| 107 | Silicon nanowire lithium-ion battery anodes with ALD deposited TiN coatings demonstrate a major improvement in cycling performance |
| 108 | Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System |
| 109 | Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates |
| 110 | Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor |
| 111 | Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma |
| 112 | Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor |
| 113 | Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter |
| 114 | Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks |
| 115 | Silicon film thickness influence on enhanced dynamic threshold UTBB SOI nMOSFETs |
| 116 | Investigating the TiN film quality and growth behavior for plasma-enhanced atomic layer deposition using TiCl4 and N2/H2/Ar radicals |
| 117 | Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks |
| 118 | Sub-0.5 nm Equivalent Oxide Thickness Scaling for Si-Doped Zr1-xHfxO2 Thin Film without Using Noble Metal Electrode |
| 119 | Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper |
| 120 | Antioxidation properties of Ti0.83Al0.17N prepared using plasma-enhanced atomic layer deposition |
| 121 | Semiconductor-like nanofilms assembled with AlN and TiN laminations for nearly ideal graphene-based heterojunction devices |
| 122 | Synaptic Plasticity and Learning Behaviors Mimicked in Single Inorganic Synapses of Pt/HfOx/ZnOx/TiN Memristive System |
| 123 | Annealing behavior of ferroelectric Si-doped HfO2 thin films |
| 124 | Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals |
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