Search Plasma ALD Publication Database By...

Publication Information

Title: Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics

Type: Journal

Info: Phys. Rev. Lett. 109, 107003, 2012

Date: 2012-05-08

DOI: http://dx.doi.org/10.1103/PhysRevLett.109.107003

Author Information

Name

Institution

Delft University of Technology

Delft University of Technology

Delft University of Technology

Delft University of Technology

Delft University of Technology

Films

Deposition Temperature = 400C

7550-45-0

7727-37-9

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Profilometry

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

AFM, Atomic Force Microscopy

Unknown

Resistivity, Sheet Resistance

Unknown

Unknown

Carrier Concentration

Hall Measurements

Unknown

Superconductivity

Unknown

Unknown

Substrates

SiO2

Silicon

Keywords

Superconductor

Notes

668

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

Follow plasma-ald.com on Twitter

Follow @PlasmaALDGuy

Shortcuts



© 2014-2018 plasma-ald.com