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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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P. J. de Visser Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. J. de Visser returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics
2Microwave properties of superconducting atomic-layer deposited TiN films