Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
Type:
Journal
Info:
ECS J. Solid State Sci. Technol. 2013 volume 2, issue 4, P149-P155
Date:
2013-01-11
Author Information
| Name | Institution |
|---|---|
| Hao Van Bui | University of Twente |
| Alexey Y. Kovalgin | University of Twente |
| Antonius A. I. Aarnink | University of Twente |
| Rob A. M. Wolters | University of Twente |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Substrates
| Silicon |
Notes
| 675 |