Publication Information

Title:
Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
Type:
Journal
Info:
ECS J. Solid State Sci. Technol. 2013 volume 2, issue 4, P149-P155
Date:
2013-01-11

Author Information

Name Institution
Hao Van BuiUniversity of Twente
Alexey Y. KovalginUniversity of Twente
Antonius A. I. AarninkUniversity of Twente
Rob A. M. WoltersUniversity of Twente

Films

Thermal TiN


Other TiN


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

Silicon

Keywords

Notes

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