Hao Van Bui Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hao Van Bui returned 3 record(s).

Number	Title
1	Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl₄/NH₃ System
2	Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al₂O₃ Thin Films
3	Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films