Rob A. M. Wolters Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Rob A. M. Wolters returned 3 record(s).

Number	Title
1	Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
2	Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl₄/NH₃ System
3	Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes