Alexey Y. Kovalgin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexey Y. Kovalgin returned 6 record(s).

Number	Title
1	Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
2	Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
3	Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
4	PEALD AlN: controlling growth and film crystallinity
5	Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl₄/NH₃ System
6	Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films