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Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia

Type:
Journal
Info:
Journal of Vacuum Science & Technology A 38, 033411 (2020)
Date:
2020-04-01
DOI:
http://dx.doi.org/10.1116/6.0000132

Author Information

Name Institution
Ramazan Oguzhan ApaydinUniversity of Twente
Arnoud J. OnninkUniversity of Twente
Xingyu LiuUniversity of Twente
Antonius A. I. AarninkUniversity of Twente
Michel P. de JongUniversity of Twente
Dirk. J. GravesteijnUniversity of Twente
Alexey Y. KovalginUniversity of Twente

Films

Thermal BN

Hardware used: Custom Hot-wire
B2H6, Diborane, Boroethane, Boron hydride, Diboron hexahydride
CAS#: 19287-45-7
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature Range = 275-375C

Plasma BN

Hardware used: Custom Hot-wire
B2H6, Diborane, Boroethane, Boron hydride, Diboron hexahydride
CAS#: 19287-45-7
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature Range = 275-375C

Plasma BN

Hardware used: Picosun R200
B2H6, Diborane, Boroethane, Boron hydride, Diboron hexahydride
CAS#: 19287-45-7
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature Range = 275-375C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: PHI Quantera SXM

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: PHI Quantera SXM

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000UI

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000UI

Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000UI

Characteristic: Uniformity
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000UI

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: Philips CM300ST-FEG

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Substrates

Si(100)
SiO2

Notes

1499