Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Xingyu Liu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xingyu Liu returned 1 record(s).

NumberTitle
1Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia