Custom Hot-wire Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Hot-wire hardware returned 12 records.

Number	Title
1	Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NH_x radical formation
2	Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
3	Atomic structure of conducting nanofilaments in TiO₂ resistive switching memory
4	Layer-by-layer epitaxial growth of GaN at low temperatures
5	Atomic layer epitaxy of Si using atomic H
6	Atomic layer epitaxy of germanium
7	Electron-enhanced atomic layer deposition of silicon thin films at room temperature
8	Nucleation and growth of tantalum nitride atomic layer deposition on Al₂O₃ using TBTDET and hydrogen radicals
9	Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
10	Atomic hydrogen-assisted ALE of germanium
11	Self-limiting diamond growth from alternating CF_x and H fluxes
12	Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium