B₂H₆, Diborane, Boroethane, Boron hydride, Diboron hexahydride, CAS# 19287-45-7

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s).

Number	Title
1	Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
2	Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization