Publication Information

Title: ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors

Type: Journal

Info: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Date: 2015-06-21

DOI: http://dx.doi.org/10.1109/TRANSDUCERS.2015.7180969

Author Information

Name

Institution

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

Films

Deposition Temperature Range = 200-300C

3275-24-9

7727-37-9

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Thickness

TEM, Transmission Electron Microscope

Unknown

Conformality, Step Coverage

TEM, Transmission Electron Microscope

Unknown

Capacitance

CV, Cyclic Voltammetry

Unknown

Substrates

CNTs, Carbon NanoTubes

Keywords

Supercapacitor

Notes

419



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