Publication Information

Title: ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors

Type: Journal

Info: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Date: 2015-06-21

DOI: http://dx.doi.org/10.1109/TRANSDUCERS.2015.7180969

Author Information

Name

Institution

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

Films

Deposition Temperature Range = 200-300C

3275-24-9

7727-37-9

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

-

Thickness

TEM, Transmission Electron Microscope

-

Conformality, Step Coverage

TEM, Transmission Electron Microscope

-

Capacitance

CV, Cyclic Voltammetry

-

Substrates

CNTs, Carbon NanoTubes

Keywords

Supercapacitor

Notes

419



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