Publication Information

Title:
ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
Type:
Journal
Info:
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Date:
2015-06-21

Author Information

Name Institution
Emmaline KaoUniversity of California - Berkeley
Chen YangUniversity of California - Berkeley
Roseanne WarrenUniversity of California - Berkeley
Alina KozindaUniversity of California - Berkeley
Liwei LinUniversity of California - Berkeley

Films


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope

Characteristic: Conformality, Step Coverage
Analysis: TEM, Transmission Electron Microscope

Characteristic: Capacitance
Analysis: CV, Cyclic Voltammetry

Substrates

CNTs, Carbon NanoTubes

Keywords

Supercapacitor

Notes

419