Chen Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chen Yang returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
2Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
3ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors