Publication Information

Title: ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors

Type: Journal

Info: Sensors and Actuators A: Physical, Vol. 240, 160 - 166 (2016)

Date: 2016-01-26

DOI: http://dx.doi.org/10.1016/j.sna.2016.01.044

Author Information

Name

Institution

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

Films

Deposition Temperature Range = 200-300C

3275-24-9

7727-37-9

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Thickness

TEM, Transmission Electron Microscope

Unknown

Conformality, Step Coverage

SEM, Scanning Electron Microscopy

Unknown

Capacitance

CV, Cyclic Voltammetry

Unknown

Substrates

CNTs, Carbon NanoTubes

Keywords

Supercapacitor

Notes

801



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