Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
Publication Information
Title:
ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
Type:
Journal
Info:
Sensors and Actuators A: Physical, Vol. 240, 160 - 166 (2016)
Date:
2016-01-26
Author Information
Name | Institution |
---|---|
Emmaline Kao | University of California - Berkeley |
Chen Yang | University of California - Berkeley |
Roseanne Warren | University of California - Berkeley |
Alina Kozinda | University of California - Berkeley |
Liwei Lin | University of California - Berkeley |
Films
Plasma TiN
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Capacitance
Analysis: CV, Cyclic Voltammetry
Substrates
CNTs, Carbon NanoTubes |
Keywords
Supercapacitor |
Notes
801 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |