Title: ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
Type: Journal
Info: Sensors and Actuators A: Physical, Vol. 240, 160 - 166 (2016)
Date: 2016-01-26
DOI: http://dx.doi.org/10.1016/j.sna.2016.01.044
Name
Institution
University of California - Berkeley
University of California - Berkeley
University of California - Berkeley
University of California - Berkeley
University of California - Berkeley
3275-24-9
Characteristic
Analysis
Diagnostic
Chemical Composition, Impurities
XPS, X-ray Photoelectron Spectroscopy
-
Thickness
TEM, Transmission Electron Microscope
-
Conformality, Step Coverage
SEM, Scanning Electron Microscopy
-
Capacitance
CV, Cyclic Voltammetry
-
CNTs, Carbon NanoTubes
Supercapacitor
801
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