Publication Information

Title: ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors

Type: Journal

Info: Sensors and Actuators A: Physical, Vol. 240, 160 - 166 (2016)

Date: 2016-01-26

DOI: http://dx.doi.org/10.1016/j.sna.2016.01.044

Author Information

Name

Institution

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

University of California - Berkeley

Films

Deposition Temperature Range = 200-300C

3275-24-9

7727-37-9

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

-

Thickness

TEM, Transmission Electron Microscope

-

Conformality, Step Coverage

SEM, Scanning Electron Microscopy

-

Capacitance

CV, Cyclic Voltammetry

-

Substrates

CNTs, Carbon NanoTubes

Keywords

Supercapacitor

Notes

801



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