Search 1555 plasma ALD publications by:
Search 1555 plasma ALD publications by:
Publication Information
Title:
Semiconductor-like nanofilms assembled with AlN and TiN laminations for nearly ideal graphene-based heterojunction devices
Type:
Journal
Info:
J. Mater. Chem. C, 2016, 4, 11067-11073
Date:
2016-10-11
Author Information
Name | Institution |
---|---|
Li Zheng | Chinese Academy of Sciences |
Xinhong Cheng | Chinese Academy of Sciences |
Peiyi Ye | University of California - Los Angeles (UCLA) |
Lingyan Shen | Chinese Academy of Sciences |
Qian Wang | Chinese Academy of Sciences |
Dongliang Zhang | Chinese Academy of Sciences |
Zongliang Wang | Chinese Academy of Sciences |
Yuehui Yu | Chinese Academy of Sciences |
Xinke Yu | University of California - Los Angeles (UCLA) |
Films
Film/Plasma Properties
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Keywords
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Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |