Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Peiyi Ye Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peiyi Ye returned 2 record(s).

NumberTitle
1Semiconductor-like nanofilms assembled with AlN and TiN laminations for nearly ideal graphene-based heterojunction devices
2Plasma-enhanced atomic layer deposition of SiO2 for channel isolation of colloidal quantum dots phototransistors