Publication Information

Title: Electrodynamic response and local tunneling spectroscopy of strongly disordered superconducting TiN films

Type: Journal

Info: Phys. Rev. B 88, 180505, 2013

Date: 2013-10-10

DOI: http://dx.doi.org/10.1103/PhysRevB.88.180505

Author Information

Name

Institution

Delft University of Technology

CEA - INAC

SRON National Institute for Space Research

CEA - INAC

Delft University of Technology

Films

Plasma TiN using Unknown

Deposition Temperature Range N/A

7550-45-0

7727-37-9

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

TEM, Transmission Electron Microscope

-

Resistivity, Sheet Resistance

Hall Bar Structures

-

Superconductivity

-

-

Substrates

Si(100)

Keywords

Superconductor

Notes

Paper available as chapter 6 in on-line thesis.

679



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