Search 1553 plasma ALD publications by:
Search 1553 plasma ALD publications by:
Publication Information
Title:
Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
Type:
Journal
Info:
Chem. Mater. 2012, 24, 2099-2110
Date:
2012-04-28
Author Information
Name | Institution |
---|---|
Taeyong Eom | Seoul National University |
Seol Choi | Seoul National University |
Byung Joon Choi | Seoul National University |
Min Hwan Lee | University of California - Merced |
Taehong Gwon | Seoul National University |
Sang Ho Rha | Seoul National University |
Woongkyu Lee | Seoul National University |
Moo-Sung Kim | Air Products |
Manchao Xiao | Air Products |
Iain Buchanan | Air Products |
Deok-Yong Cho | RWTH Aachen University |
Cheol Seong Hwang | Seoul National University |
Films
Film/Plasma Properties
Substrates
Si(100) |
SiO2 |
TiN |
TiO2 |
Keywords
Notes
638 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |