Your search for plasma enhanced atomic layer deposition publications authored by Taeyong Eom returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories|
|2||Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition|
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