Moo-Sung Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Moo-Sung Kim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
2Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
3Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories