Moo-Sung Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Moo-Sung Kim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
2Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
3Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma